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气体用质量流量传感器; 热测量原理;量程范围为±200sccm至±1 slpm 数字I²C总线接口; 在两个流动方向上均提供*测量
技术规格
| Flow ranges | 0...±200 sccm to 0...±1 slpm |
| Output signal | I²C bus |
| Repeatability and hysteresis (max.) | ±0.25 of reading |
| Flow connection | tube fitting (Ø 5.1 mm) |
| Size without ports and pins (approx.) | 31 x 16 x 32 mm |
气体用质量流量传感器; 热测量原理;量程范围为±200sccm至±1slpm;电压输出：0.5V至5V; 在两个流动方向上均提供*测量
技术规格
| Flow ranges | 0...±200 sccm to 0...±1 slpm |
| Output signal | 1...5 V |
| Repeatability and hysteresis (max.) | ±0.25 of reading |
| Flow connection | tube fitting (Ø 5.1 mm) |
| Size without ports and pins (approx.) | 31 x 16 x 32 mm |
气体用质量流量传感器; 热测量原理;量程范围为2至50 slpm;电压输出：0.5V至4.5V; 在两个流动方向上均提供*测量
技术规格
| Flow ranges | 0...2 to 0...50 slpm |
| Output signal | 0.5...4.5 V |
| Repeatability and hysteresis (typ.) | ±0.25 of reading |
| Flow connection | tube fitting (Ø 5.1 mm) |
| Size without ports and pins (approx.) | 70 x 34 x 20 mm |